Renishaw InVia Raman spectrophotometer specifications

• Dual excitation sources (532 nm and 785 nm lasers)
• An optical microscope (Leica) with high quality objective lenses
• A motorised spectrometer lenses which automatically align for each configuration
• Grating stage with dual gratings (1800 lines mm^-1 for 532 nm and 1200 lines mm^-1 for 785 nm)
• A thermoelectrically cooled (- 70 ºC) CCD detector
• Spot size of < 2 μm for 50x objective lens
• Spatial resolution < 1 μm
• Laser line specific Rayleigh filters with a dual filter arrangement to optimise sensitivity
• Raman shift range of 100 – 4000 cm⁻¹
• A Raman   probe   and   SEM   interface   for   coupling   the   InVia spectrophotometer to an SEM

JSM-6510LV Scanning Electron Microscope specifications

• Operating voltage of 1-30 kV.
• Resolution: High-vacuum mode:
  • • 30 kV 0 nm (SEI, 8 mm WD)
    • 3 kV 8.0 nm (SEI, 6 mm WD)
    • 1 kV 15 nm (SEI, 6 mm WD)

• Magnification of 5x – 300, 000x
• Pressure range in the specimen chamber: 10 to 270 Pa
• Image Signals:
  • • High-vacuum mode: secondary electron and backscattered electron imaging
    • Low-vacuum mode: backscattered electron imaging, Multi- element solid state BSE detector standard on LV models

• Working distances 5-40 mm with tilt -5 – 70 degrees
• BSE Detector with 3 nm resolution
• Stage navigation system